ion beam mixing ( review)

Abstract

Ion beam mixing (IBM) is a widely used method for modifying the structure and properties of bilayer and multilayer systems. The idea behind IBM is to create a surface alloy by homogenizing alternate layers deposited in a thickness ratio so that they result in a desired final composition after mixing. In this review some basic aspects of ion beam mixing reviewed. these include describe the basic mechanism of the phenomena of ion beam mixing; also a brief description of the phenomenological various models used for quantitative calculation of different mixing parameters.